佳能二手i-line光刻機(jī)CANON FPA 3000 I4 參數(shù)：
|
Magnification
|
5X |
|
Resolution
|
0.35um
|
|
Wafer Size
|
8" SEMI (OF)
|
|
Wafer Loader
|
TYPE6-L
|
|
Reticle Size
|
6" |
|
Reticle Changer
|
Canon standard Type
|
|
Chamber Type
|
CD-80
|
佳能二手i-line光刻機(jī)CANON FPA 3000 I4 實(shí)物圖：
